Application Case of Mini Diaphragm Pump Replacing Rotary Vane Pump in Particle Counting
Application case of Mini diaphragm pump replacing rotary vane pump in particle counting. Background introduction: Recently, the National Standards Committee issued GB/T 25915.1-2021 “Clean Rooms and Related Controlled Environments-1: Air Cleanliness Level”. The document was modified to adopt ISO 14644-1:2015 “Clean…